Organization
Organization Organization for the Strategic Coordination of Research and Intellectual Properties Professor (non-tenured)
Title
Professor (non-tenured)
External link
USUDA KOJI
Papers
-
Surface-pyramid-induced strain relaxation in (110)-oriented SiGe thin films revealed by Micro-Raman spectroscopy Reviewed
Yuta Ito, Koji Usuda, Kiu Inami, Naoto Kumagai, Toshifumi Irisawa, Atsushi Ogura
MATERIALS SCIENCE IN SEMICONDUCTOR PROCESSING 209 2026.7
MISC
-
CVD-SiGe/Si(110)構造における SiGe 層の臨界膜厚のGe濃度依存性
臼田宏治, 伊波希宇, 熊谷直人, 熊谷直人, 入沢寿史, 小椋厚志
応用物理学会春季学術講演会講演予稿集(CD-ROM) 73th 2026年 2025.3
-
Anisotropy Analysis of SiGe Thin Film Grown on Si (110) Off-Angle Substrates by Chemical Vapor Deposition
伊波希宇, 伊波希宇, 臼田宏治, 熊谷直人, 熊谷直人, 入沢寿史, 入沢寿史, 小椋厚志, 小椋厚志
応用物理学会学術講演会講演予稿集(CD-ROM) 86th 2025
-
Strain Evaluation of Surface Roughness Effect in SiGe Epi. Thin Films on (110)Si Sub. by Raman Spectroscopy
伊藤佑太, 伊藤佑太, 伊波希宇, 伊波希宇, 臼田宏冶, 小椋厚志, 小椋厚志
応用物理学会学術講演会講演予稿集(CD-ROM) 86th 2025
-
Examination of Method for Evaluating Critical Thickness of SiGe/Si(110) Structures
臼田宏治, 伊波希宇, 伊波希宇, 熊谷直人, 熊谷直人, 入沢寿史, 入沢寿史, 小椋厚志, 小椋厚志
応用物理学会学術講演会講演予稿集(CD-ROM) 86th 2025